| 摘要 |
PURPOSE: A roller for transferring a substrate and a substrate transferring apparatus including of the same are provided to minimize the occurrence of electro static caused by friction occurring when transferring a substrate. CONSTITUTION: A body(122) is fixed to and inserted into a shaft, and has a cylindrical shape. A contact member(124) is installed at the external surface of the body, and a lower portion(102a) of a substrate(102) contacts with the contact member, so the occurrence of the electro static caused by the friction with the substrate can be minimized. The contact member is made of an acetal material. |
