PLASMA PROCESSING CHAMBER WITH GROUND MEMBER INTEGRITY INDICATOR AND METHOD FOR USING THE SAME,申请号KR20070106554-传众专利搜索

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发明名称	PLASMA PROCESSING CHAMBER WITH GROUND MEMBER INTEGRITY INDICATOR AND METHOD FOR USING THE SAME
摘要
申请公布号	KR100923594(B1)	申请公布日期	2009.10.23
申请号	KR20070106554	申请日期	2007.10.23
申请人		发明人
分类号	H01J9/24;H01J11/02	主分类号	H01J9/24
代理机构		代理人
主权项
地址

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