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发明名称
IONISATION VACUUM GAUGES AND GAUGE HEADS
摘要
A gauge head (10) for an ionisation vacuum gauge includes an electrical device (12, 28, 54) operable to provide an electrical discharge in a gas whose pressure is to be measured to initiate ion discharge in the gas.
申请公布号
WO2009063233(A3)
申请公布日期
2009.10.22
申请号
WO2008GB50913
申请日期
2008.10.07
申请人
EDWARDS LIMITED;KEY, MATTHEW
发明人
KEY, MATTHEW
分类号
H01J41/06
主分类号
H01J41/06
代理机构
代理人
主权项
地址
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