发明名称 OPTICAL MEMBER, LIGHT ROUTING UNIT, AND EXPOSURE APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical member composed of calcium fluoride (fluorite) and capable of being prevented in deterioration, and demonstrating a long life even in use under severe conditions. <P>SOLUTION: The optical member of a preferred embodiment has: a base material having an entrance face into which light is incident, a total reflection face totally reflecting the incident light, and an exit face from which the totally reflected light emerges to the outside, and formed of a calcium fluoride crystal; and a protecting layer formed on a surface outside the total reflection face in the base material. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009244881(A) 申请公布日期 2009.10.22
申请号 JP20090079616 申请日期 2009.03.27
申请人 NIKON CORP 发明人 TANI HIROHISA;NIIZAKA TOSHISUKE
分类号 G02B5/04;G02B5/08;H01L21/027 主分类号 G02B5/04
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