| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluorine gas generating apparatus that prevents an electrolytic bath from clogging in pipes, valves or the like and can be continuously operated for a long time. SOLUTION: The fluorine gas generating apparatus 100 is equipped with an electrolytic cell 3 housing an electrolytic bath 4 comprising a melt salt containing hydrogen fluoride, and has discharge passages 11a, 11b where a fluorine-containing gas generated by electrolysis of the electrolytic bath 4 passes, and elimination towers 5a, 5b where impurities are eliminated from the fluorine-containing gas. The discharge passages 11a, 11b are disposed to connect a vapor phase part in the electrolytic cell 3 and the elimination towers 5a, 5b. The apparatus is further equipped with first line heaters 12a, 12b that heat the inner walls of the discharge passages 5a, 5b and/or the gas passing through the discharge passages 5a, 5b to a temperature equal to or higher than the melting point of the electrolytic bath 4. COPYRIGHT: (C)2010,JPO&INPIT |
