| 摘要 |
<P>PROBLEM TO BE SOLVED: To highly sensitively manufacture a pattern formed body irradiation-treated floating-island-likely with a vacuum ultraviolet ray, using the vacuum ultraviolet ray. <P>SOLUTION: A metal mask 10 for the vacuum ultraviolet ray is used in a method of irradiation-treating a pattern forming face pattern-shape-likely with the vacuum ultraviolet ray, by arranging the metal mask on the pattern forming face of a pattern forming substrate 101, and by irradiating the pattern forming face with the vacuum ultraviolet ray, via the metal mask, in the presence of a reactive gas, has a metal mask body 1 comprising a thin metal sheet and having an opening part, a floating island portion 2 arranged inside the opening part of the metal mask body, and a bridge portion 3 for connecting the floating island portion and the metal mask body, and the bridge portion is formed to form a free space flowable with the reactive gas between the pattern forming face and the bridge portion, when arranged on the pattern forming substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
