| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reference plate, an optical axis adjustment method of a surface inspection apparatus and the surface inspection apparatus for determining whether a linear array camera receives a regular reflection light, and implementing a visual field adjustment in the longitudinal direction of a to-be-inspected object. Ž<P>SOLUTION: The optical axis adjustment method includes: a step using the reference plate 30 formed with a first surface aspect region 31 including a visual field reference line 33 and a second surface aspect region 32, and adjusting a tilt angle of the linear array camera 12 so as to set the tilt angle in the direction orthogonal to the longitudinal direction of the visual field reference line 33 within a predetermined range; and a step for translating the visual field of the linear array camera 12 in the direction orthogonal to the longitudinal direction of the visual field reference line 33, and adjusting the number of imaging elements having an intensity within a predetermined allowable range to the predetermined number or more. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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