| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage apparatus in which the effect of heat generated in a linear motor is reduced as much as possible when moving a moving member with desired accuracy. SOLUTION: A first seating surface 21 in a protrusion 20a, which protrudes toward a slider base plate 10d, is provided on a steel mounting bracket 20 forming roughly a rectangular block body. Three first bolt holes 23a, through which three first bolts 22 pass, are formed on the first seating surface 21. Because first bolt passing holes 23 communicated with the first bolt holes 23a are extended in the vertical direction, the first bolts 22 can be inserted into the first bolt passing holes 23 from the top surface 20b of the mounting bracket 20 and the first bolt 22 is screwed to a female screw portion (not shown) formed in the slider base plate 10d. Thereby, the mounting bracket 20 is firmly fixed to the slider base plate 10d. COPYRIGHT: (C)2010,JPO&INPIT |
