| 摘要 |
<P>PROBLEM TO BE SOLVED: To make it possible to easily, inexpensively and highly accurately measure the shape of an inspection surface. Ž<P>SOLUTION: In an imaging system 4, an imaging means 40 having a two-dimensional image sensor 42, and a moving holding means 43 for holding the imaging means 40 movably along a screen 32 are provided. The imaging means 40 is moved successively relative to an interference fringe formed on the screen 32 by the moving holding means 43, and image information of each partial domain of the interference fringe is acquired in each movement by the two-dimensional image sensor 42. Shape information of an inspection aspherical surface 8a is acquired by a shape analysis means 71 based on the acquired image information of each partial domain. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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