CERAMIC PROBE CARD AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A ceramic probe card and a manufacturing method thereof are provided to implement the high integration of the probe pad by decreasing the area of the probe pad. CONSTITUTION: A manufacturing method of ceramics probe card is as follows. A ceramic green sheet is laminated, and ceramic blocks(11,12,13,14,15) on which a via electrode is arranged are formed. The plurality of ceramic block is plasticized. The via electrode locations of plasticized ceramic blocks are matched. The plurality of ceramic block is joined. The probe pad(40) is formed on the via electrode exposed to the uppermost surface among the united ceramic block. The probe needle is formed on the probe pad.