| 摘要 |
<p>PURPOSE: A regulator for high purity is provided to reduce the amount of parts and to remove noise due to foreign materials. CONSTITUTION: A body(10) has an inlet(11) and an outlet(12). A diaphragm(13) is formed on top of the body. A valve member(16) is located on a lower part along with a spring(14) and a stem(15). A plug(17) fixes the valve member and is held with a locker formed on the body. A pair of lockers faces and is located the both sides of plug mounting location neighboring.</p> |
