发明名称 POLYMER
摘要 <P>PROBLEM TO BE SOLVED: To provide a resin having high stability with respect to water, excellent heat resistance and excellent dissociating property with respect to an acid generated by an acid generator. Ž<P>SOLUTION: The resin contains a repeating unit expressed by formula (1), wherein R represents a hydrogen atom or a 1-5C alkyl group and R' represents a group dissociable by an action of an acid, and has a mass average molecular weight of 1,000 to 500,000 measured by size exclusion chromatography. The polymer has a bulky group derived from an adamantane group in a side chain, and is subjected to molecular design so as to dissociate a group introduced to a side chain terminal. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009235184(A) 申请公布日期 2009.10.15
申请号 JP20080081028 申请日期 2008.03.26
申请人 JSR CORP 发明人 ENDO TAKESHI;MATSUMOTO KOZO;BARKAKATY BALAKA
分类号 C08F22/16;C08F8/12 主分类号 C08F22/16
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