| 发明名称 |
METHOD OF MINIMIZING BEAM BENDING OF MEMS DEVICE BY REDUCING THE INTERFACIAL BONDING STRENGTH BETWEEN SACRIFICIAL LAYER AND MEMS STRUCTURE |
| 摘要 |
The beam bending of a MEMS device is minimized by reducing interfacial strength between a sacrificial layer and a MEMS structure.
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| 申请公布号 |
US2009258455(A1) |
申请公布日期 |
2009.10.15 |
| 申请号 |
US20080101627 |
申请日期 |
2008.04.11 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COTTE JOHN M.;HOIVIK NILS D.;JAHNES CHRISTOPHER;LU MINHUA;ZHANG HONGQING |
| 分类号 |
H01L21/00;B32B17/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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