| 发明名称 |
APPARATUS AND METHODS FOR MANUFACTURING THIN-FILM SOLAR CELLS |
| 摘要 |
Improved methods and apparatus for forming thin-film layers of semiconductor material absorber layers on a substrate web. According to the present teachings, a semiconductor layer may be formed in a multi-zone process whereby various layers are deposited sequentially onto a moving substrate web.
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| 申请公布号 |
US2009258444(A1) |
申请公布日期 |
2009.10.15 |
| 申请号 |
US20090424512 |
申请日期 |
2009.04.15 |
| 申请人 |
GLOBAL SOLAR ENERGY, INC. |
发明人 |
BRITT JEFFREY S.;ALBRIGHT SCOT |
| 分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
| 代理机构 |
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