LASER SCRIBE INSPECTION METHODS AND SYSTEMS

摘要

Methods and systems for use during laser-scribing of a workpiece (104) are provided. Some of the methods and systems provided use an imaging device (320, 388, 448, 472, 506, 722, 742, 814) to control the formation of a laser-scribed feature so as to more closely align with a previously-formed feature. Some of the methods and systems provided use an imaging device (320, 388, 448, 472, 506, 722, 742, 814) for inspection of a laser-scribed feature and/or process control. Some of the methods and systems provided use an imaging device to (320, 388, 448, 472, 506, 722, 742, 814) detect and avoid a workpiece defect (826A, 826B) during the formation of a laser-scribed feature.