| 摘要 |
PROBLEM TO BE SOLVED: To provide a production device for a sheet with a metal oxide thin film, which can uniformly form the sheet with a metal oxide thin film on the surface of a sheet at high speed in such a manner that the oxidizing degree in the thickness direction is made uniform, even in the case of a relatively thick oxide metal thin film of 50 to 300 nm, and to provide a method for producing the sheet with the metal oxide thin film. SOLUTION: The production device for the sheet with the metal oxide thin film comprises: a conveying means which has a sheet guiding face 3 conveying a sheet while being brought into contact with the sheet 1 and conveying the sheet with the movement of the sheet guiding face; an evaporation source 8 scattering metal vapor 10 toward the sheet on the sheet guiding face; and an oxygen introduction means introducing oxygen for conducting oxidation reaction with the metal vapor, and wherein, a metal oxide thin film is continuously formed on the sheet to be conveyed. The oxygen introduction means comprises a plurality of introduction tubes arranged in the sheet width direction, further arranged on the upstream side and the downstream side in the sheet conveying direction 25 of an evaporation source 7, and are also projected toward a region between the evaporation source and the sheet guiding face. COPYRIGHT: (C)2010,JPO&INPIT
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