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发明名称
MICROMECHANICAL COMPONENT WITH WAFER THROUGH-PLATING AND CORRESPONDING PRODUCTION METHOD
摘要
申请公布号
EP2010449(B1)
申请公布日期
2009.10.14
申请号
EP20070727176
申请日期
2007.03.21
申请人
ROBERT BOSCH GMBH
发明人
FEYH, ANDO
分类号
B81B7/00;B81C1/00;H01L21/768
主分类号
B81B7/00
代理机构
代理人
主权项
地址
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