| 摘要 |
A positioning apparatus includes a beam which is driven in a first direction that is perpendicular to the longitudinal direction of the beam, a movable member which surrounds at least a part of the beam and moves with the beam moving in the first direction, an actuator which generates a force in the first direction between the beam and the movable member to control a positional relationship in the first direction between the beam and the movable member, and a position regulator arranged between the beam and the movable member and which regulates the positional relationship in the first direction between the beam and the movable member.
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