| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of accurately correcting output changes with the temperatures of piezoelectric elements. Ž<P>SOLUTION: A piezoelectric element 20 for oscillation detection and a piezoelectric element 21 having temperature characteristics different from those of the piezoelectric element 20 are superposed on each other via an electrical insulation sheet 22 to constitute an oscillation sensor. The oscillation sensor is fixed in a metal case 1 in such a way that the piezoelectric elements 20 and 21 may be positioned on lines which intersect with a surface to be measured at right angles. Temperatures are computed on the difference between output voltages of the piezoelectric elements 20 and 21 to perform temperature correction on output voltages of the piezoelectric elements 20. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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