METHOD AND APPARATUS FOR FAST MEASUREMENT OF 3-DIMENSIONAL OBJECT

摘要

PURPOSE: A three dimensional high speed measuring apparatus and a method thereof for measuring the form are provided to reduce an error according to a time by obtaining interference pattern and an image in a desired place. CONSTITUTION: A three dimensional high speed measuring apparatus and a method thereof for measuring the form include an optical source unit(100), a reference mirror, a driver, an image pickup device, and a controller. The optical source section emits the light to office. The reference mirror reflects the light split at the reference beam. The driver operates and moves the reference mirror. The image pickup device obtains the dark fringe of the plural number and interferes the reflection light and the reference beam reflected through the object.