METHOD FOR FORMING ALUMINUM NITRIDE LAYER ON SURFACE OF ALUMINUM OR ALUMINUM ALLOY MATERIAL

摘要

<P>PROBLEM TO BE SOLVED: To provide a method for forming an AlN layer on a surface of an Al material or an Al alloy material to be used for various kinds of applications at low cost. Ž<P>SOLUTION: After the surface of an Al material or an Al alloy material is treated for 5 to 15 minutes by using BHF solution, the material is subjected to the thermal cleaning treatment for 3 to 30 minutes at the temperature of ≥660°C and <660°C of the Al or Al alloy material in a vacuum vessel to remove any surface oxide. Thereafter, ammonium gas preferably heated to the temperature of 660-750°C is introduced into the vacuum vessel to perform the nitriding treatment of the Al or Al alloy material at the temperature of ≥660°C and <660°C with any oxide on its surface being removed for 1-10 hours. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž