SYNTHESIS SYSTEM FOR SILICON CARBIDE NANOPOWDERS

摘要

PURPOSE: An apparatus for synthesizing silicon carbide nanopowder is provided to fast-cool the surface of the nanoparticles during the synthesizing process of silicon carbide nanopowder with the help of a cooling gas supplier in order to prevent the generation of high-temperature surface heat. CONSTITUTION: An apparatus(10) for synthesizing silicon carbide nanopowder comprises a synthesizing vessel(100), plasma torch(300), precursor gas supplier(400), a pair of cooling gas suppliers(500), carbon electrode(600), and vacuum pump(200). The synthesizing vessel has an opened space inside. The plasma torch generates the plasma within the synthesizing vessel. The precursor gas supplier supplies a liquid silicone-carbide compound carried by a carrier gas into the synthesizing vessel. The cooling gas suppliers supply the cooling gas from the both ends of the precursor gas supplier at constant angle to the center line of the synthesizing vessel. The carbon electrode is used as a plasma electrode. The vacuum pump discharges the silicon carbide nanopowder as well as other materials as a form of exhaust gas.