GLASS SUBSTRATE INSPECTING APPARATUS AND GLASS SUBSTRATE INSPECTING METHOD

摘要

Defect inspection accuracy is improved by correcting warping of a glass substrate without generating excessive stress concentration on a side of the glass substrate, while meeting a demand of inspecting defects with a simple apparatus constitution while the glass substrate is being shifted. A glass substrate inspecting apparatus (1) inspects existence of defects included in a glass substrate (G) by scanning the glass substrate (G) by using a defect detecting means (3) by relatively moving the glass substrate (G) in the vertical posture to the defect detecting means (3) in the width direction of the glass substrate (G). The glass substrate inspecting apparatus is provided with an upper holding means (4) which holds the upper side of the glass substrate (G), and a lower holding means (5) which holds the lower side of the glass substrate (G). The glass substrate (G) is held only by the upper holding means (4) and the lower holding means (5), and the upper holding means (4) and the lower holding means (5) are separated one from the other. The glass substrate (G) is shifted in the width direction toward the defect detecting means (3), in a state where tension is applied to the glass substrate (G) in the vertical direction.