| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus for a hollow container, which has an improved gas supply pipe so as to stably mix a plurality of gases or switch among them in order to eliminate such a defect that the plasma of the film-forming apparatus for the hollow container becomes unstable and a nonuniform film is formed. SOLUTION: The apparatus for forming a film on the hollow container includes at least a housing for forming the film therein while using plasma, a high-frequency power source for generating the plasma, the gas supply pipe and a vacuum exhausting device. The gas supply pipe has a plurality of gas supply tubes in such a state that one or more gas supply tubes are coaxially arranged in the inner part of the gas supply pipe. COPYRIGHT: (C)2010,JPO&INPIT
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