发明名称 |
CONTROLLER FOR A POSITIONING DEVICE, METHOD FOR CONTROLLING A POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHIC APPARATUS PROVIDED WITH A POSITIONING DEVICE |
摘要 |
A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.
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申请公布号 |
US2009244767(A1) |
申请公布日期 |
2009.10.01 |
申请号 |
US20080331829 |
申请日期 |
2008.12.10 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
HEERTJES MARCEL FRANCOIS;JOHANNES SIMONS WILHELMUS FRANCISCUS;HUBERTINA, HOUBEN DENNIS ANDREAS PETRUS;MARIA GOOSSENS JEFFREY HENDRIKUS PETER |
分类号 |
G11B5/596 |
主分类号 |
G11B5/596 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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