Norbornene-type polymers, compositions thereof and lithographic processes using such compositions,申请号EP20080019326-传众专利搜索

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发明名称	Norbornene-type polymers, compositions thereof and lithographic processes using such compositions
摘要
申请公布号	EP2031007(A3)	申请公布日期	2009.09.30
申请号	EP20080019326	申请日期	2006.02.21
申请人	PROMERUS LLC;TOKYO OHKA KOGYO CO., LTD.	发明人	RHODES, LARRY F.;CHANG, CHUN;KANDANARACHCHI, PRAMOD;SEGER, LAWRENCE D.;ISHIDUKA, KEITA;ENDO, KOTARO;ANDO, TOMOYUKI
分类号	C08G61/06;G03F7/039;G03F7/11;G03F7/20	主分类号	C08G61/06
代理机构		代理人
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