| 摘要 |
Provided is an imprint mold structure containing: a substrate; and a concave-convex portion formed by arranging on one surface of the substrate convex portions with reference to the surface, the imprint mold structure being used for an imprint method containing a transferring step and a curing step, wherein the imprint mold structure satisfies the following formula 1: HBR < HMS < HAR
where HMS is a hardness of an outermost surface on the transfer side of the imprint mold structure, HBR is a hardness of the imprint resist layer in the transferring, HAR is a hardness of the imprint resist layer after the curing, and HMS is 1 GPa or less.
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