发明名称 Semiconductor device and method for manufacturing the same
摘要 Embodiments relate to a semiconductor device and a method for manufacturing the same. According to embodiments, the semiconductor device may include a semiconductor substrate formed with a metal interconnection, a first interlayer dielectric layer formed on the metal interconnection and having a first contact plug, a second interlayer dielectric layer formed on the first interlayer dielectric layer and having a second contact plug, and a third interlayer dielectric layer formed on the second interlayer dielectric layer and having a third contact plug, wherein the first to third contact plugs are connected to each other.
申请公布号 US7595556(B2) 申请公布日期 2009.09.29
申请号 US20060567681 申请日期 2006.12.06
申请人 DONGBU HITEK CO., LTD. 发明人 KANG JIN AH
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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