发明名称 PHOTORESIST STRIPPER COMPOSITION FOR SUBSTRATE CONTAINING SILVER AND/OR SILVER ALLOY, METHOD FOR MANUFACTURING PATTERN USING THE SAME, AND DISPLAY APPARATUS CONTAINING THE SUBSTRATE
摘要 <P>PROBLEM TO BE SOLVED: To provide a photoresist stripper composition applicable to a substrate containing silver and/or silver alloy. <P>SOLUTION: The photoresist stripper composition for the substrate containing silver and/or silver alloy contains one or more selected from a group consisting of compounds expressed by formula (I): NH<SB>2</SB>-A-Y-B-Z, formula (II): NH<SB>2</SB>-A-N(-B-OH)<SB>2</SB>, morpholine, N-substituted morpholine, pyrocatechol, hydroquinone, pyrogallol, gallic acid, and gallic acid esters, and one or more polar organic solvents. In the formula (I), A and B independently represents a straight-chain or branched-chain 1 to 5C alkylene group; Y represents NH or O; Z represents NH<SB>2</SB>, OH, or NH-D-NH<SB>2</SB>, wherein D represents a straight-chain or branched-chain 1-5C alkylene group. In the formula (II), A and B are the same as in the formula (I). <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009217279(A) 申请公布日期 2009.09.24
申请号 JP20090105900 申请日期 2009.04.24
申请人 SONY CORP;KANTO CHEM CO INC 发明人 OWADA HIROHISA;ISHIKAWA NORIO;YOKOYAMA SEIICHI
分类号 G03F7/42;G02F1/13;G02F1/1335;G02F1/1343;H01L21/027;H01L21/304;H01L51/50;H05B33/10;H05B33/26 主分类号 G03F7/42
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