| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus with a comparatively simple structure, having an agitating means with a simple structure for agitating liquid to be treated on a sheet-like substrate on which an object to be treated is adhered. SOLUTION: The treatment apparatus allows treatment of an object S by a treating liquid R present on an adherence face P1 of the sheet-like substrate P on which the object S has been adhered. The treatment apparatus includes a treating section on which the substrate P is installed, an agitation member 3 having a flat face 31 arranged to face to the adhered face P1 through a space and a displacement means for displacing the agitation member 3 toward the face direction of the adherence face P1. In addition, the treatment apparatus has a distance regulating means 5 for keeping the gap distance h1 of the space to be constant, and the displacement of the agitation member 3 by the actuation of the displacement means is a displacement with the constant gap distance h1. The treatment apparatus thus constituted agitates the treating liquid R by displacing the agitation member 3 by operating the displacing means, with the space filled with the treating liquid R. COPYRIGHT: (C)2009,JPO&INPIT
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