| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas detecting device for detecting gas for semiconductor materials in exhaust gas from the semiconductor manufacturing equipment, which prevents gas other than measurement target gas from flowing into the gas detector in a high concentration state resulting from maintenance work of semiconductor manufacturing equipment, thereby preventing damage of a gas detector. SOLUTION: The gas detecting device is provided with: a gas detector 3, and a flow passage switch valve 11 for switching between a gas introduction pipe 2 for introducing the gas to be measured to the gas detector and an air introduction pipe 12 for introducing atmosphere, and switches the flow passage switching valve 11 so as to introduce atmosphere from the air introduction pipe 12 when gas other than the gas to be measured flows into the gas introduction pipe 2. COPYRIGHT: (C)2009,JPO&INPIT
|
