| 摘要 |
PURPOSE: A beam irradiator is provided to increase the degree of arc discharge and to decrease the frequency of an electrode moving from a contact position to a discharge position by arranging a pair of electrodes to be face toward each other. CONSTITUTION: A beam irradiator comprises a supporting unit, electrode, moving unit, power supplier, contact detecting unit, arc discharge detecting unit and controller. The supporting unit(10) has a head(11) with an inner space in it. The electrode(20) is installed on the supporting unit and one end of it is exposed to the inner space of the head. The moving unit moves the electrodes in order for them to repeatedly get near and further. The power supplier applies arc discharge voltage to the electrode. The contact detecting unit detects the contact condition of the exposed end parts of the electrodes. The arc discharge detecting unit detects whether or not the arc discharge is generated between electrodes. The controller controls the moving unit so as to move the electrodes based on the output of both the arc discharge detecting unit and contact detecting unit. The exposed end parts of the electrodes are arranged in a crow line and face each other.
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