| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping device capable of setting an arm width of a clamp arm narrow except at least a clamp for lapping, and a lapping method. SOLUTION: The lapping device 1 comprises a lapping film having abrasive grains attached to one of surfaces of a thin substratum, the clamp arm 20 having the lapping film extended over for clamping a part of a workpiece W to be worked and covering a worked surface of the workpiece with the lapping film, and a guide means (a first guide roller 41) provided on the clamp arm and guiding the lapping film while narrowing a passage width of the film passing through at least regions other than clamps 23 and 24 for lapping. COPYRIGHT: (C)2009,JPO&INPIT |
