| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of use of an expanded graphite sheet capable of preventing the damage of an inner crucible used in silicon manufacture, restraining the SiC formation on an outer crucible, and uniformly transmitting heat from the outer crucible to the inner crucible, and a method of manufacturing silicon using the method of the use. <P>SOLUTION: In a crucible 1 having an inner quartz crucible 2 and an outer graphite crucible 3, an expanded graphite sheet 4 having a gas transmissivity of less than 1.0×10<SP>-4</SP>cm<SP>2</SP>/s and a heat conductivity of not smaller than 120 W/m×K is placed between the both crucibles, whereby gas shielding is kept and uniform heating of the crucible becomes possible. <P>COPYRIGHT: (C)2009,JPO&INPIT |
