| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact cleaning device which can efficiently perform the cleaning of a bar-shaped member. SOLUTION: The cleaning device includes: cases 10a, 11A having a storage part 5 storing a workpiece 1 at the inside; and a cleaning liquid feed/exhaust apparatus 2A performing the feed/exhaust of a cleaning liquid to the storage part 5. The cases 10a, 11A are dividedly composed so as to be openable/closable in such a manner that the charge/discharge of the workpiece 1 to the storage part 5 can be performed. The workpiece 1 is cleaned with the cleaning liquid fed into the storage part 5 and exhausted therefrom. COPYRIGHT: (C)2009,JPO&INPIT
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