| 摘要 |
PROBLEM TO BE SOLVED: To provide an innovative adhering matter separation apparatus capable of efficiently separating adhering matter adhering to a film-like or sheet-like substrate forming a layer. SOLUTION: The separation apparatus includes a throwing inlet to throw an object to be treated which is a substrate bearing adhering matter forming a layer in one face or both faces through, an approximately cylindrical treatment tank 31 for storing the object to be treated, a rotary shaft 72, a plurality of rotating blades 81 of which the base ends are fixed in the rotary shaft 72 and which have the length in the same direction as that of the treatment tank 31, a substrate discharge path 69 for discharging the substrate after separation of the adhering matter in the other end side of the treatment tank 31, a plurality of guiding ribs for guiding the air in the treatment tank 31 to the substrate discharge path 69 side, a large number of apertures 32d formed in the treatment tank 31, and an adhering matter recovery part for recovering the adhering matter passing through the apertures and is characterized in that the apertures 32d are set at an angle approximately rectangular to the rotating direction of the rotating blades 81 add formed to have sliding rims sliding on the object to be treated. COPYRIGHT: (C)2009,JPO&INPIT |
