| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump capable of maintaining an inside of a casing at sufficient temperature stably and uniformly while keeping electric power consumption low. SOLUTION: The turbo molecular pump 30 has a jacket member 70 installed on an outer circumference part 64 of the casing 40 so as to cover an outer circumference of a rotor part 44, and heat insulation property of the casing 40 is increased. Consequently, heat of a heater 50 arranged at an outlet 54 side is efficiently transferred to a whole inside of the casing 40, and temperature of the inside of the casing 40 can be uniformly maintained at sufficient temperature. Temperature drop of the inside of the casing 40 due to an external environment such as blow of cleaning air is relaxed and stabilization of temperature of the inside of the casing 40 can be simultaneously achieved. Moreover, an additional heater such as a band heater is not necessary and increase of electric power consumption due to that can be avoided. COPYRIGHT: (C)2009,JPO&INPIT
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