EVALUATION METHOD, EVALUATION APPARATUS, AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To evaluate the optical characteristics of an inspected optical system more simply with higher accuracy.

SOLUTION: An evaluation method for evaluating the optical characteristics of the inspected optical system by using an interferometer includes: a first imaging process (1801) for imaging a first interference fringe acquired by the interferometer in a state where the disposition of movable elements of the interferometer in the optical axis direction of the optical system is a first disposition; a second imaging process (1803) for imaging a second interference fringe acquired by the interferometer in a state where the disposition of the movable elements in the axis direction is a second disposition; a determination process (1805) for determining the pupil center coordinates of the optical system based on the first and second interference fringes; and a calculation process for calculating the optical characteristics of the optical system by using the center coordinates determined in the determination process.

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