| 摘要 |
PROBLEM TO BE SOLVED: To provide an anti-static component with high performance and high reliability which has less risk of an open state, short circuit, and lower performance even if subjected to repeated application of high-voltage static electricity. SOLUTION: The anti-static component includes a cavity 2 buried in an element 1, a pair of discharge electrodes 3 and 4 counter to each other via the cavity 2, and terminal electrodes 5 and 6 connected to the discharge electrodes 3 and 4. Each of the discharge electrodes 3 and 4 and the terminal electrodes 5 and 6 is made of a metal material containing a tungsten of≥80 wt.%. COPYRIGHT: (C)2009,JPO&INPIT
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