发明名称 WAFER LEVEL CHIP SIZE PACKAGE FOR IC DEVICES USING DICING PROCESS AND METHOD FOR MANUFACTURING THE SAME
摘要 A wafer level chip scale package and a manufacturing method thereof are provided to reduce the number of packaging processes using a dicing process and a thin film deposition process. An integrated device(220) is formed on a substrate(210). An electrode pad(230) is electrically connected to the integrated device. The conductive layer electrically connects a bump formed in the electrode pad and substrate backside. The electrode pad is reclaimed inside an insulating layer formed in an area which is adjacent to a dicing line. A passivation layer is formed on a conductive layer lower part and substrate back side. A photosensitive layer(240) is formed on the electrode pad.
申请公布号 KR20090098497(A) 申请公布日期 2009.09.17
申请号 KR20080023927 申请日期 2008.03.14
申请人 PARK, TAE SEOK 发明人 PARK, TAE SEOK;KIM, YOUNG SUNG;BAE, SANG JUN;CHO, KYU SUNG
分类号 H01L21/301;H01L23/48 主分类号 H01L21/301
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