发明名称 |
WAFER LEVEL CHIP SIZE PACKAGE FOR IC DEVICES USING DICING PROCESS AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A wafer level chip scale package and a manufacturing method thereof are provided to reduce the number of packaging processes using a dicing process and a thin film deposition process. An integrated device(220) is formed on a substrate(210). An electrode pad(230) is electrically connected to the integrated device. The conductive layer electrically connects a bump formed in the electrode pad and substrate backside. The electrode pad is reclaimed inside an insulating layer formed in an area which is adjacent to a dicing line. A passivation layer is formed on a conductive layer lower part and substrate back side. A photosensitive layer(240) is formed on the electrode pad. |
申请公布号 |
KR20090098497(A) |
申请公布日期 |
2009.09.17 |
申请号 |
KR20080023927 |
申请日期 |
2008.03.14 |
申请人 |
PARK, TAE SEOK |
发明人 |
PARK, TAE SEOK;KIM, YOUNG SUNG;BAE, SANG JUN;CHO, KYU SUNG |
分类号 |
H01L21/301;H01L23/48 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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