SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS

摘要

A substrate transfer apparatus and a substrate processing apparatus are provided to prevent influence of a sudden inertial force in a transfer material by controlling a speed according to S curve. A substrate transfer apparatus transfers a substrate(90), and changes a transfer speed of the substrate. A first conveyor transfers the substrate to a fixed direction. A second conveyor is serially arranged about the first conveyor, and transfers the substrate. A control unit independently controls a transfer speed of a substrate by the first conveyor and the second conveyor. The control unit performs a synchronization control.