发明名称 Fuse structures, methods of making and using the same, and integrated circuits including the same
摘要 A structure configured to disconnect circuit elements. The structure generally includes a dielectric layer over a light-absorbing structure, and a lens over the dielectric layer and the light-absorbing structure, configured to at least partially focus light onto the light-absorbing structure. The light-absorbing structure absorbs a first wavelength of light with a minimum threshold efficiency, the lens is substantially opaque to the first wavelength of light, and the dielectric layer is substantially transparent to the first wavelength of light. The structure advantageously provides improved reliability and smaller chip area, thereby increasing the yield of the manufacturing process and the numbers of die per wafer (both gross and good).
申请公布号 US7589363(B1) 申请公布日期 2009.09.15
申请号 US20070805290 申请日期 2007.05.22
申请人 MARVELL INTERNATIONAL LTD. 发明人 CHENG CHUAN-CHENG;YU SHUHUA;CHEN ROAWEN;WU ALBERT
分类号 H01L27/10;H01L23/525;H01L29/00 主分类号 H01L27/10
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