发明名称 |
SYSTEM AND METHOD FOR DETECTING PARTICLE GENERATION SOURCE, AND STORAGE MEDIUM THEREFOR |
摘要 |
A system for determining occurrence factors of particles includes a user interface device, and an apparatus for detecting the occurrence factors of particles. The apparatus for detecting the occurrence factors of particles includes a storage unit that stores a program for executing a calculation method for calculating a likelihood of each of the occurrence factors of particles in the form of a score; and a calculation unit for calculating the score for each of the occurrence factors of particles based on particle distributions at least on a surface of a substrate using the stored program. The user interface device displays the calculated score for each of the occurrence factors of particles.
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申请公布号 |
US2009228215(A1) |
申请公布日期 |
2009.09.10 |
申请号 |
US20090398523 |
申请日期 |
2009.03.05 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MORIYA TSUYOSHI |
分类号 |
G06F19/00;G01N15/00;H01L21/3065;H01L21/66 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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