DEPOSITORY MONITORING SYSTEM IN SEMICONDUCTOR STORAGE WAREHOUSE

摘要

A depository monitoring system for use in a semiconductor factory comprises a plurality of carriers, each holding at least one semiconductor object; a depository monitoring host for monitoring a depository of each carrier; and a plurality of RFID tags and a plurality of RFID readers. It is characterized in that the RFID tags are disposed on the carriers and/or semiconductor objects, respectively, wherein each RFID tag has a tag information; the RFID readers read/write the tag information from/to the RFID tags; and the depository monitoring host comprises: a legacy database to store information related to the depository monitoring system; an RFID middleware for processing operations between the RFID readers and the RFID tags; a web interface for processing commands and query results through a B2B internet; an input/output interface for processing commands and query results through an intranet; and a depository controller for performing a sequence of processes in depository monitoring.