发明名称 THE LASER DISING SHEET AND METHOD FOR MANUFACTURING CHIP BODY
摘要 <p>The present invention aims to prevent cutting of a dicing sheet, damage to a chuck table and fusion bonding of a dicing sheet to a chuck table by laser light during laser dicing. Specifically disclosed is a laser dicing sheet which is characterized by being composed of a base made of a polyurethane acrylate and an adhesive layer formed on one side of the base.</p>
申请公布号 KR20090096439(A) 申请公布日期 2009.09.10
申请号 KR20097011527 申请日期 2007.11.29
申请人 LINTEC CORPORATION 发明人 WAKAYAMA YOJI;SATO YOSUKE;TAYA NAOKI
分类号 H01L21/301;C09J7/02;C09J201/00 主分类号 H01L21/301
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