| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a polishing device capable of improving durability of a polishing brush and maintaining high polishing accuracy in relation to an end edge of a workpiece by suppressing deformation of a bristle distal end of the polishing brush when polishing the end edge of the workpiece. <P>SOLUTION: This polishing device 1 is provided with a suppression means 15 for suppressing deformation of the bristle distal end of the polishing brush 3 in polishing. When polishing the end edge of the workpiece, deformation of the bristle distal end of the polishing brush 3 is suppressed. As a result, durability of the polishing brush 3 is improved, and high polishing accuracy in relation to the end edge of the workpiece is maintained. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
