METHOD FOR DEPOSITING METAL-FREE CARBON LAYERS,申请号EP20030718664-传众专利搜索

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发明名称	METHOD FOR DEPOSITING METAL-FREE CARBON LAYERS
摘要
申请公布号	EP1470263(B1)	申请公布日期	2009.09.09
申请号	EP20030718664	申请日期	2003.01.28
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	BEWILOGUA, KLAUS;WITTORF, RALF;THOMSEN, HELGE
分类号	C23C14/06;C23C14/02	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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