| 摘要 |
The invention relates to superconductors, namely to devices for vacuum deposition of high-quality thin layers of superconductig materials and can be used in different fields of science and technics. The device for obtaining superconducting layers includes a vacuum chamber (1) comprising a vacuum pump (2), a magnetron (3), an electrode support (4) with target (6), fixed into a rotary mechanism (8), and a substrate (7). On the electrode support (4) it is mounted a metal screen (5) of cylindrical form.
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