LOW TEMPERATURE CO-FIRED CERAMICS WITH DIFFUSION-BLOCKING LAYER AND METHOD OF MANUFACTURING THE SAME

摘要

An LTCC substrate and a manufacturing method thereof are provided to prevent diffusion between materials of a first ceramic layer and a second ceramic layer by forming a diffusion barrier between the first ceramic layer and the second ceramic layer. An LTCC substrate includes a first ceramic layer(111), a second ceramic layer(112), and a diffusion barrier(110'). The first ceramic layer is made of material having a first dielectric constant. The second ceramic layer is made of material having a second dielectric constant lower than the first dielectric constant. The diffusion barrier is interposed between the first ceramic layer and the second ceramic layer. The diffusion barrier is made of the first ceramic layer material, the second ceramic layer material, and a barium compound. The diffusion barrier prevents diffusion between the materials of the first ceramic layer and the second ceramic layer.