| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal infrared detector that is formed in a structure having a first element in which a temperature sensing section is held in midair in an air space and a second element in which a temperature sensing section is disposed on a remaining sacrifice layer, allows temperature of the temperature sensing section of the second element to accurately follow that of a substrate and can prevent a trouble during the removal of a sacrifice layer, and to provide a method for manufacturing the thermal infrared detector. SOLUTION: In the thermal infrared detector, the first element 1a for detecting infrared rays and the second element 1b for correcting ambient temperature are formed on a circuit substrate 2. The temperature sensing section 14 of the first element 1a is thermally isolated from the circuit substrate 2 by an air space 15. The temperature sensing section 14 of the second element 1b is formed on a first sacrifice layer 5 made of diamond like carbon remaining in the air space and is thermally coupled to the circuit substrate 2 via the first sacrifice layer 5. An output signal of the temperature sensing section 14 is transmitted to a read-out circuit 2a via an electrode wire 9 and a difference in an output signal is detected by the read-out circuit 2a. COPYRIGHT: (C)2009,JPO&INPIT
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